Low Radiation Coating Line
Magnetron Coating Line
Exit Lock Chamber
One large-area lid lifted by hydraulic system. Minimized the volumes to attain the shortest pumping time. Air venting system equipped on the lid to keep constant gas flow.
Vacuum
The vacuum contains as following: Rotary vane pump, Roots pump, Dry pump, Molecular pump.
Sputtering Cathhode Device
NorthGlass can offer you the complete rotary cathode and planar cathode system (incl. lid, gas distribution). The sputtering device can be customized for all new and regular coater, which can facilitate the customer to integrate with local and/or remote control (digital or analog).
Sputtering Zone
The Sputtering zone consists of several identical sputter chambers. Each process module is subdivided into multiple identical compartments in pitch in transport direction. Each compartment can be used as pump, cathode or blank compartment. Each compartment is equipped a view port (with shuttler for cathode). Utilities such as gas, water and electrical power will be connected directly to the lid or chamber.
Core Component
Cathode
Core Component
Magnet Bar
Core Component
End Blocks
